Yini i-bonding wire? Iqhawe elingabonakali le-semiconductor ret reliability

Njengochwepheshe ku-micro-machining kanye nemisebenzi yesayensi, izinsuku zami zigcwele izingxoxo ezijulile zobuchwepheshe nonjiniyela abanjengonjiniyela abanjengoMarcus eJalimane. Yizona ezikwimigqa yangaphambili, zicindezela imingcele yalokho okwenzeka ku-semiconductor kanye nokukhiqiza ngogesi kwamandla. Isihloko esivela ngokumangala okumangazayo kungukuthobeka wire bonding. Le mpi encane ye insimbi yanama ini, kuvame ukuncipha kunezinwele zomuntu, kuvame ukunganakwa, kepha kukodwa ngenye yezinto ezibucayi kakhulu kunoma yimuphi umjikelezo ohlanganisiwe (Ig). Ukwehluleka kule microscopic xaxa inganikeza insiza eyinkimbinkimbi futhi ebizayo engenamsebenzi. Le ndatshana ayiyona indawo yokuthengisa; Ukungena ngaphakathi kwisayensi yesayensi kanye nobunjiniyela obuya ekwakheni okuphezulu-ukuthembeka wire bonding. Sizohlola izinto ezahlukahlukene, izakhiwo zazo ezihlukile, nokuthi kungani isinqumo esifanele uwaya kubalulekile empumelelweni yomkhiqizo wakho wokugcina.

Iyini inhloso eyisisekelo yocingo olubophayo?

Ezingeni layo eliyisisekelo kakhulu, a wire bonding kuyinto enhle kakhulu, ephezulu-ubumsulwa uwaya kusetshenziselwa ukudala -gesi ukuxhumana ngaphakathi a i-semiconductor idivaysi. Isebenza njengebhuloho eliguquguqukayo, liphethe amandla nezimpawu phakathi kwe-silicon xhoza (Ig) kanye nokuhola kwensimbi yephakethe lakhe elivikelayo. Cabanga ngakho njengohlelo lwezinzwa lwe-chip. Ngokungafani nokusebenzisa umthengisi, okubandakanya ukuncibilika futhi akunakwenziwa ngezinga elihle kangako ngaphandle kokulimaza i-chip entekenteke, uwaya okokubopha inqubo yombuso oqinile. Okukhethekile umshini wokubopha sebenzisa uhlobo lwe-ultrasonic amandla, amandla, futhi kwesinye isikhathi ukushisa ukudala i-metallurgical weld, noma ubudlelwano, kuwo womabili amaphetho we uwaya.

Lokhu okuncane ukuxhuma kumele kube ukuqina okumangalisayo. Kudinga ukubekezelela ukucindezelwa kwemishini, ukuhamba ngebhayisikile, futhi uphathe ugesi wamanje ngaphandle kokonakalisa isikhathi sokuphila kwedivayisi. Ukukhethwa kwe uwaya impahla, ububanzi bayo, kanye nokuqondile kwayo Izakhiwo Ezibonakalayo Bonke badlala indima ebalulekile ekwakheni okuphumelelayo nokuthembekile uwaya ubudlelwano. Wonke umuntu ubudlelwano kumele kube okuphelele.

Kungani izinhlobo ezahlukene ze-wire bonding ezidingekayo?

Asikho "isixazululo esisodwa esilingana nayo yonke" kufika wire bonding. Ukukhethwa kwezinto ezibonakalayo kuyinhlangano yobunjiniyela obucayi obuqhutshwa izimfuno ezithile zohlelo lokusebenza, kufaka phakathi izindleko, ukusebenza, kanye nesikhathi eside ukuthembeka. Izinto ezintathu eziyinhloko ezisetshenzisiwe ziyigolide (AU), ithusi (CU), futhi aluminiyamu (Al). Ngamunye unesethi ehlukile yezakhiwo ezenza zilungele izinhlobo ezahlukene zokubopha kanye nemikhiqizo ehlukene yokuphela.

Unjiniyela kufanele acabangele izinto eziningana:

• Inqubo yokubopha: Ingabe ijubane eliphezulu ibhondi yebhola inqubo noma ukunemba bond bond? Igolide futhi ithusi zilungele ibhondi yebholaing, ngenkathi aluminiyamu kuyindinganiso ye-ultrasonic shaya okokubopha.
• Izidingo Zokusebenza: Ngabe idivaysi isebenza ngamafrikhthi aphezulu noma ithwala amasondo aphezulu? Ithusi inomusa ukuqina kukagesi, kodwa ucingo lwegolide inikeza ukumelana okuhle kakhulu ekugqwaneni.
• Izingqinamba zezindleko: Igolide Wire Bonding inqubo evuthiwe kodwa ebizayo. Ucingo lwethusi ihlinzeka ngenye indlela ephansi yokusebenza okuhle kakhulu, ngenkathi I-Aluminium Wire futhi kubiza kakhulu.
• Ukwethembeka kwesikhathi eside: Izoba kanjani uwaya Hlangana ne I-Bond Pad Metallurgy ngokuhamba kwesikhathi nasezingeni lokushisa elisebenzayo? Ukuvimbela ukwakheka kwe-Brittle kokuphakathi kokukhathazeka okubalulekile.

Unjani ubunjiniyela be-legolide nge-high-speed ibhola ukubopha ibhola?

Ucingo lwegolide ingabe okwangempela nokuqonda kahle kakhulu wire bonding. Ngenkathi kubonakala kuqondile, igolide elihlanzekile Kusetshenziswe kulolu hlelo lokusebenza empeleni kuyinto ebaluleke kakhulu. I-Gold Bonding Wire cishe ayinacala 99.99% imali ebomvu. Kunenhloso "kudonswa" ngamanani amancane, alawulwa ezinye izinto zokwenza kahle izakhiwo zawo zokufunwa inqubo yokubopha ibhola.

Lawa ma-dopants, angafaka izinto ezifana I-Beryllium (Be) noma indawo emisiwe yasePalladium (Pd), yengezwa ngenxa yezizathu eziningana. Basiza ukulawula ukwakheka okusanhlamvu kwe insimbi yanama ini njengoba kuqinisa ngemuva kokudala Mahhala. Isakhiwo esiqinile, esingaguquki sokusanhlamvu sibalulekile ekwakheni okuqinile nokuphindaphindiwe ubudlelwano. Ama-dopants akhulisa ubulukhuni be uwaya, okusiza ukuthi kuxhase ihlanzekile uluphu ukwakheka ngaphandle kokugcoba. I-Encherned Engine ucingo lwegolide ihlinzeka ngebhalansi ephelele yokuthamba kokudala ubudlelwano nokuqina kokugcina ukwakheka kwe-loop. Amandla okwenza okuphelele, okuyindilinga ibhola impahla eyingqayizivele ye ucingo lwegolide futhi iphakathi ku inqubo yokubopha ibhola.

Yini ama-trade-off of usebenzisa ithusi njengocingo oluhlanganisa?

Ucingo lwethusi sekuphenduke enye indlela ethandwa kakhulu ucingo lwegolide, ngokuyinhloko iqhutshwa ngokonga izindleko ezibalulekile. Kusuka ekubukeni kokusebenza, ithusi kuyindlela enhle kakhulu. Inama-40% aphezulu ukuqina kukagesi futhi kungcono kakhulu Ukuvuselelwa okushisayo kunegolide. Lokhu kwenza kube kuhle kumadivayisi kagesi adinga ukuphatha amasondo aphezulu kanye nokushisa okuhlukile. Kodwa-ke, ukusebenza nge ucingo lwethusi Kuveza isethi eyingqayizivele yezinselelo onjiniyela okufanele baphathe ngayo.

Inselelo enkulu kakhulu yi-oxidation. Ithusi kwakha kalula onside ungqimba lapho kuvezwa umoya, ikakhulukazi emazingeni okushisa aphakeme we ijermosonic okokubopha. Leli onside kungaphazamisa ukwakheka kokuhle ubudlelwano. Ukunqoba lokhu, Imishini yokubopha i-wire lokho kusetshenziswa ithusi Kufanele usebenze endaweni ezungezile, kuvalwe ngokuvamile kugesi ye-nitrogen. Ngaphezu kwalokho, ithusi kunzima kakhulu kunegolide. Lokhu kusho phezulu ubudlelwano amabutho futhi uhlobo lwe-ultrasonic Amandla ayadingeka, okukhulisa ubungozi bokulimaza ubuthakathaka anzini afe ngaphansi I-Bond Pad. Ukunciphisa lokhu, izinhlelo zokusebenza eziningi manje zisebenzisa I-Palladium ehlanganisiwe yethusi uwaya. Ungqimba omncane we indawo emisiwe yasePalladium kuvikela ithusi kusuka ku-oxidation futhi kuthuthukisa ubudlelwano ukuthembeka.

I-Aluminium Wire i-Aluminium Wire Inketho Ephakeme Yokwethenjwa?

Ngenkathi igolide futhi ithusi Phatha ibhondi yebhola Imakethe, I-Aluminium Wire Inkosi ka Ukubopha kwe-wedrasonic wedge. Lokhu kuyiqiniso ikakhulukazi kuma-semiconductors ama-Power semiconductors, ezenzelwa izimoto, namamojula we-RF. Isizathu esiyinhloko salokhu ukuhambisana kwe-metallurgical. Le khasi ubudlelwano amaphedi a i-semiconductor kufa cishe njalo kwenziwa aluminiyamu. Uma u ubudlelwano a I-Aluminium Wire ku aluminiyamu Pad, udala uhlelo lwe-mono-metallic. Lokhu kuzinzile ngokwemvelo futhi kuyathembeka ngokuhamba kwesikhathi, ikakhulukazi emazingeni okushisa aphezulu.

Lapho a ucingo lwegolide ihlanganiswe ku aluminiyamu pad, inqubo yesimo esiqinile ukungcola kuqala, kwakha igolide-aluminiyamu amakhompiyutha aphakathi nendawo esibonakalayo. Ezinye zalezi zinhlaka zingama-brittle futhi zingaholela ubudlelwano Ukwehluleka empilweni yomkhiqizo, into ebizwa ngokuthi "inhlupheko onsomi." Ngokusebenzisa I-Aluminium Wire, le ndlela enkulu yokwehluleka iyavinjwa ngokuphelele. Ngezicelo ezifuna izinga eliphakeme kakhulu lesikhathi eside ukuthembeka, esindayo ibanga elinquma phakathi ububanzi besingelezi I-Aluminium Wire Emsulwa exhunywe nge-robust bond bond kuyindinganiso yegolide. Yilokhu Uhlobo lwe-wire Sibona kusetshenziswe kaningi ekufuneni izinhlelo zokusebenza zezimoto nezimboni.

Izakhiwo zemishini zifana kanjani nokugcwala kanye namandla ashukumisayo kuthonya isibopho se-wire?

Lapho unjiniyela ethola a spool iwa- wire bonding, i ukucacisa ishidi lizohlunga izakhiwo ezifanayo -the ngqi amandla futhi ubude. Lezi akuzona izinombolo nje; bayizinkomba ezibucayi zendlela uwaya uzoziphatha ngejubane eliphezulu umshini wokubopha.

• Amandla ashubile (noma umthwalo wokudiliza): Lokhu kukala amandla adingekayo ukuphula uwaya. A uwaya kumele iqine ngokwanele ukumelana nezingcindezi ze okokubopha inqubo, kufaka phakathi "izinyembezi" zokugcina ngemuva kwesibili ubudlelwano phakathi ku bond bond inqubo. Noma kunjalo, a uwaya lokho kuqine kakhulu kungaba nzima ubudlelwano futhi kungadinga amandla amakhulu.
• Ukwelula: Lokhu kulinganisa malini uwaya ingalula ngaphambi kokuba iphuke, ivezwe njengephesenti. Lokhu kuyipharamitha ebucayi ngokwengeziwe. A uwaya ngokuhle ubude ingenamqondo futhi ixolele ngesikhathi ubudlelwano ukwakheka. Kubalulekile futhi ekwakheni izilonda ezingaguquguquki, ezinzile. A uwaya ngephansi ubude i-brittle futhi ingaholela ekuqhekekeni kwesithende se ubudlelwano, ngenkathi a uwaya ngokuphakeme ngokweqile ubude ingaba ithathe kakhulu, okuholela uluphu i-sagging noma i-wire sway. Le khasi ubude kulawulwa ngokucophelela ngesikhathi uwaya Inqubo Yokukhiqiza Ngokuhlanganiswa Komdwebo Futhi onakoizinyathelo.

Kuthiwani "DOPING" I-Bonding Wire Empeleni yenzani ukwenza ngcono ukusebenza kwayo?

I- "Doping" inqubo yokwengeza amanani amancane kakhulu, alawulwa kakhulu wezinye izinto e-Primary insimbi yanama ini ukuthuthukisa izakhiwo zayo. Sikhuluma ngamazinga ezingxenyeni zesigidi (i-PPM). Lokhu akuyona nje elula ingxubevange; Kuyisayensi eqondile. Inhloso yalawa ma-dopants ukukhwabanisa isakhiwo se-metallurgical of the uwaya.

Ngokwesibonelo, ku ucingo lwegolide, ama-dopants asiza ukucwilisa isakhiwo sokusanhlamvu. Ngesimo sayo esimsulwa, insimbi yanama ini inezinhlamvu ezinkulu, ezithambile. Ukungeza ama-dopants kudala amasayithi we-nuclerity, okuholela esakhiweni sokusanhlamvu esilinganayo, esifanayo. Lokhu kwenza uwaya inamandla futhi, okubaluleke kakhulu, iqinisekisa ukuthi ukushisa-Afflected Zone ngenhla ibhola kamuva uhlobo lwebhola iqinile futhi iqinile. Lokhu kuvimbela okuvamile icala eyaziwa ngokuthi "indawo ethinteke kakhulu (haz) sag," okungadala uwaya ukumfushane ngokumelene namaphethelo afe. Ngokufanayo, phakathi I-Aluminium Wire, engeza i-1% anzini kuqinisa kakhulu i uwaya futhi ikuvimbele ekuthambekeni kakhulu, okubalulekile Ukubopha kwe-wedrasonic wedge. Isinqumo sokuthi umncede a uwaya ihlala ibhalansi yokufeza umshini owufunayo izakhiwo zocingo.

Ngabe uqinisekisa kanjani ikhwalithi nokwethenjwa kwe-spool ye-bonding wire?

Ngonjiniyela njengoMarcus, ukuvumelana kuyinto yonke. Inqubo esebenza kahle neyodwa spool iwa- uwaya kumele isebenze kahle kanye nelandelayo. Ukulawulwa kwekhwalithi ye wire bonding ngakho-ke kuyahlanzeka ngendlela emangalisayo. Kuqala ngezinto ezingavuthiwe, okumele kube eziphakeme kakhulu ubumsulwa (e.g., 99.99% noma "4N" ubumsulwa).

Kuwo wonke umdwebo futhi onakoinqubo ye-ing, the ububanzi bentambo kumele igcinwe ekubekezeleni okuqinile ngokuqinile. Ngisho nokuhluka okuncane kungathinta amapharamitha ahlanganisa futhi kuholele emiphumeleni engahambisani. Okokugcina uwaya bese ngaphansi kwebhethri lokuhlolwa ngokuya ngamazinga afana Isosha Indlela yokuhlola F72. Lokhu kufaka phakathi ukukala umthwalo wayo wephula futhi ubude. Le khasi ngaphandle ye uwaya kumele futhi kube pristine, mahhala kunoma yikuphi ukungcoliswa noma ukuklwebheka okungaphazamisa ubudlelwano. Ekugcineni, uwaya isilonda kuklanywe ngokukhethekile spool ngaphansi kwengxabano elawulwayo ukuvikela noma yimuphi umonakalo owenziwe ngomshini. Isitoreji esifanele nokusingathwa nakho kuyabucayi, njengoba kubona okunconyiwe impilo yeshelufu. Le khasi ikhwalithi ye-bond ukuboniswa okuqondile kwekhwalithi ye uwaya.

Yiziphi izindlela ezivamile zokuhluleka ezihlobene nama-wine obondi?

Lapho a uwaya ubudlelwano yehluleka, the uwaya ngokwayo kungaba imbangela. Ukuqonda lokhu kwehluleka kubalulekile ekuxazululeni inqubo.

• Intambo ye-sag / sway: I uwaya uluphu anciphise futhi athinte eduze uwaya noma onqenqemeni lwabafa, kubangele umjikelezo omfushane. Lokhu kuvame ngenxa ye uwaya Ukuthambisa kakhulu (okungalungile ingxubevange noma onakongi).
• Isithende Uqhekeka: Amafomu okuqhekeka esisekelweni se shaya ubudlelwano. Lokhu kungabangelwa a uwaya lokho kuncane kakhulu (okuphansi ubude) noma ngokuguqulwa ngokweqile ngesikhathi ubudlelwano.
• Ukopishwa kwebhondi: I ubudlelwano yehluleka ukunamathela. Ngenkathi kuvame ukuba yinkinga yepharamitha, kungabangelwa ukungcoliswa ku uwaya ngaphandle.
• I-wire ephukile ku-haz: Phakathi ku ibhondi yebhola, i uwaya ikhefu nje ngenhla kwe ibhola. Lokhu kukhomba esakhiweni sokusanhlamvu esilawulwa ngokungafanele ku uwayaindawo ethintekile ukushisa.

Lezi zinkinga zigqamisa ukuthi kungani ubambiswano olujulile phakathi komkhiqizi wedivayisi kanye uwaya Umhlinzeki ubaluleke kakhulu. Kaningi, ukuxazulula inkinga okokubopha Inkinga idinga ukuhlaziya ngokubambisana kokubili okokubopha inqubo kanye uwayaisayensi yezinto ezibonakalayo. Sivame ukusiza amaklayenti ethu asebenzisa kwethu Izikweletu ze-othomathikhi ukuthola nokuxazulula lezi zinkinga.

Ngabe ukukhethwa kocingo okulungile kuthuthukisa kanjani ukuthembeka kwedivaysi yesikhathi eside?

Ukukhethwa kwe wire bonding inomthelela omkhulu esikhathini eside ukuthembeka ye umjikelezo ohlanganisiwe. Okuqala ubudlelwano Ikhwalithi kumane nje kuyisiqalo sendaba. Le khasi uwaya kanye ubudlelwano kumele siphile iminyaka yokusebenza ezindaweni ezihlanhlekile. Okulungile Ukukhetha kwezinto ezibonakalayo kubalulekile ukuvimbela ukwehluleka okuvela kuphela ngemuva kwezinkulungwane zamahora wokuhamba ngebhayisikoshi.

Njengoba kushiwo, ukusebenzisa I-Aluminium Wire phezu kwa- aluminiyamu Amaphakethe aqeda ubungozi begolide e-brittle-aluminiyamu ukuhlangana. Ingomane ucingo lwethusi, usebenzisa a indawo emisiwe yasePalladium I-coating ingavimba i-oxidation futhi iqinisekise ukuqina kwe ubudlelwano. Le khasi Umthamo wamanje wokuthwala ye uwaya kumele futhi kubhekwe. Usebenzisa a uwaya ngokunganele ububanzi bentambo Okokudinga okukhona njengamanje okufanele ukuthwala kuzokwenza ukuthi ishiye ngokweqile, ukusheshisa ukuguga futhi kungaholela ekwehlulekeni. Ukunwebeka okushisayo coefflicafleant ye uwaya okuhlobene nalezi zonke izinto zokwakha iphakheji kungenye into okufanele ibe khona kubhekwe. Kwesokudla wire bonding akuyona nje ingxenye; Kuyinto eyisisekelo yedivayisi yakhelwe ukuthembeka.